* High Speed Automatic Tuning
* Broad Impedance Coverage Correspond
* High Power with Duration of Operation
* Light Weight with Compact Design
The 102Y series automatic tuning coupler is designed to connect with the 13.5MHz RF generator which output impedance is 50 ohms, and various load for industrial purpose.
The extremely wide range of impedance which is about 4 to 60 ohms (resistance), and +j40 to -j200 ohms (reactance) can be tuned automatically at a stretch. By this situation, 102Y series will adaptable to the chamber with the volume of 20 to 90 cu.cm and various type of gaseous body.
The 102Y-x is automatically adapted to the broad impedance range with high speed, therefore manual operation is unnecessary. The previous models sometimes had a problem to match when the VSWR is over 3 : 1, the 102Y-x incorporates with an unique error detective circuit which ignores improper matching points, and proceeds till proper points are acquired. One continuous tuning cycle insures broad impedance matching.
Approx. 10 % of maximum power is required for proper tuning. If the level is any higher, tuning time is shortened. In the case of an unknown load, re-tune cycle. Small impedance changes occurred during operations have been matching in a second to keep the VSWR of less than 1.3 : 1.
Above the model 102Y-4 (2kW) incorporates with a extremely reliable vacuum capacitor in the tuning circuit.
102Y-5 (4.5kW) and above models incorporates with a liquid cooled inductor. These heavy-duty ones are able to withstand extreme operation.
Special loads, and frequencies are available upon request.
|Tuning Accuracy||Less than VSWR 1.3 : 1|
( Connector )
|50 ohms (Nominal) (-N-)||50 ohms
|Output RF Power Ave.||300 W||600 W||1 kW||2 kW||4.5 kW||10 kW|
|Tuning Speed||When VSWR 10 : 1 Loaded|
|5 Seconds Max.||10 Seconds Max.|
|Power Requirements||115VAC Single Phase 50 to 60Hz|
|50W Max.||60W Max.||70W Max.||100W Max.||150W Max.|
|Cooling System||Environment||Forced Air Cooling||Forced Air,
|Dimension (H x W x D mm)||150 x 290 x 250||195 x 335 x 300||240 x 355 x 300||215 x 390 x 335|
|Weight||6.0 kg||6.5 kg||7.0 kg||7.5 kg||12.0 kg||15.0 kg|